Webinar

Utilising In-situ Plasma Diagnostics for Enhanced Deposition Control

 

Date: 5th December 2024

 

Time: 15:00 GMT

 

This webinar will provide an in-depth exploration of the motivation behind achieving precise control over deposition processes, focusing on how environmental conditions directly impact the properties of thin films. By understanding and controlling these parameters, tailored films can be fabricated to meet specific performance requirements.

A variety of diagnostic techniques will be discussed, including time-resolved Langmuir probe measurements, modified Quartz Crystal Microbalance (QCM) monitoring, Optical Emission Spectroscopy (OES), and both time- and energy-resolved Time-of-Flight Mass Spectrometry (E-TOFMS). These tools provide insights into key deposition parameters that can be adjusted to optimise thin film characteristics. Case studies will cover a range of materials, including metallic alloys, diamond-like carbon, and nitrides, illustrating how these techniques can be applied to control and tune film properties in diverse applications.

 

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Register now

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What you will learn?

  • Introduction to metal deposition and HiPIMS
  • Introduction to Reactive Sputtering
  • Experiment overview
  • Langmuir Probe measurements and comparison to metal versus DLC deposition properties
  • Quantum RFEA measurements compared to metal deposition properties
  • Q&A

Learn from industry experts

Join our speaker for a discussion and Q&A session

Tom Headshot_1

Dr. Thomas Gilmore

Plasma Expert

Impedans


  • Turningitors into lead
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Dr. Caroline Hain

PosPostdoctoral researcher

Empa

Thomas is a physicist with over 15 years of experience in the field of plasma science. Starting in 2017, he took on the role of sensor application development at Impedans Ltd. This role allowed him to leverage his expertise in the field, developing cutting-edge technologies to enhance our understanding of plasma behavior.

Building on this foundation, he further assumed the position of Chief Product Officer in 2020. In this capacity, he has been instrumental in shaping the company's product portfolio and defining strategic business directions. 

 

 

 

Caroline Hain holds a bachelor’s and master’s degree in materials science from AGH University of Kraków. She completed her PhD jointly at École Polytechnique Fédérale de Lausanne (EPFL)'s PV-Lab and the Plasma Surface Engineering group at Bern University of Applied Sciences (BFH), under the supervision of Dr. Aicha Hessler-Wyser and Dr. Thomas Nelis. Her thesis, titled "Plasma-Assisted Hybrid Vapour Deposition Technology for Thin Film Fabrication," focused on understanding the deposition environment through in situ plasma diagnostics to enhance control over thin film deposition, particularly for diamond-like carbon (DLC) and nitride materials.

Caroline's thesis received the Outstanding Thesis Award from the Swissvacuum Society and the Silver Sustainability Award from the German Vacuum Society (Deutschen Vakuum-Gesellschaft DVG e.V.). 

Now a postdoctoral researcher at Empa’s Laboratory for Mechanics of Materials and Nanostructures, Caroline continues her work on reactive magnetron sputtering processes while expanding into plasma-enhanced atomic layer deposition (PEALD).

Impedans, 2024